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Metal-insulator-semiconductor devices based on surface plasmon polaritons CA2873573
CA2873573

Metal-insulator-semiconductor devices based on surface plasmon polaritons

Plasmon waveguides may be used as a modulator or photodetector.  Such waveguides are said have either an Attenuated Total Reflection (ATR) or Surface Plasmon Polaritrons (SPPs) architecture.  In the case of ATR a out-of-plane optical beam is coupled to SPPs propagating along a metal surface.  Further, ATR-based photodetectors have used either a prism or grating to couple the incident optical beam to SPPS.  The latter is of interest here.

An optical circuit is created with a laser source and detector.  Between these two a grating structure acts as a modulator and provides for generation of SPPs.  In one example the grating is fabricated on a semiconductor wafer.  Here, a layer of insulation is provided over a doped Si wafer.  A metallic (incl. materials with metallic properties) grating is provided over the insulation, and a thick layer of dielectric is provided over the grating.  Contacts are made to contacts are the edge of the grating and the substrate.  Further, a bias circuit can be fabricated to apply a desired bias between the metal and substrate, where the bias alters the Index of Refraction.  In operation, a fibre is aligned over the grating such that an incident optical beam impacts the grating and SPPs are produced and travel along the grating.  

In one example, the structure is fabricated on a silicon wafer, where it facilitates wafer testing with a reduced number of probes i.e. non-contact optical.  Thus, the system is applicable to wafer testing, with structures, for example, being placed in scribe channels.  It is also indicated that the system is applicable to optical interconnects and biosensors.  One might envision creation of the grating and waveguides in a MEMS device.  

Applicant(s):

University of Ottawa

 

Filing Date:

2014-Dec-08

Inventor(s):

Berini, Pierre Simon Joseph

Chen, Chengkun

ExploreIP

Google Patents

 

Other patents by lead inventor (select):

N/A

Independent Claims:

 1   – Apparatus

23 – Apparatus

24 – Method

Analyst Comments:

 

A potential application to or integration with a MEMS device strikes as interesting.  The components could be readily produced with semiconductor processing. The MEMS device might then be used in a biosensor.

Coming Soon … A patented technology is often directed a solving one problem.  However, the technology may be applicable to other fields.  There are  many examples of a technology jumping fields.  So, it never hurts to look.  We will look within the IPmart system, leveraging the Framework to tie fields together.  There are too many ideas to write here!

Coming Soon … This is where we will look for technology from similar or related fields. We ask what are complimentary & competitive technologies?  These might include technologies approaching the same problem or technologies that build on the advances of the instant technology.

Technology Tree

Where am I? The technology is generally an optical component.  More specifically is looks at the generation of SPPs with a grating-based system.  Further. a bias is applied to the structure.

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